05 December 2024

Types of vacuum pumps

soorten vacuum pompen types of vacuum pumps

Vacuum pumps by Acclon: the right solution for every process

At Acclon Technologies, we provide vacuum pumps that perfectly match the requirements of various processes. With our extensive knowledge and experience, we deliver high-quality pumps that meet the most stringent specifications. Below is an overview of the different types of vacuum pumps we offer, including their features and applications.

Diffusion pumps

Diffusion pumps are ideal for applications requiring ultra-high vacuum, such as research institutions and high-tech production processes. These pumps operate by dragging gas molecules along in a directed vapor stream. You will find the Diffstak series and the nHT series by Edwards in our range.

Key Features:

  • Achieves extremely low gas pressures (UHV).
  • Energy-efficient due to optimized heat transfer.
  • Suitable for applications such as coating, analytical instrumentation, and space research.

Semiconductor pumps

Specifically designed for the semiconductor industry, these dry semiconductor pumps deliver exceptional performance under demanding conditions. The iXH and iXH series are engineered to minimize corrosion and by-product accumulation.

Key Features:

  • Environmentally friendly and low-maintenance.
  • Excellent temperature range for precise process control.
  • Ideal for chip production, etching, and lithography.

Multiroots vacuum pumps

Multiroots pumps are suitable for processes requiring fast and stable evacuation, such as vacuum ovens and drying processes. The nXR series combines performance and durability.

Key Features:

  • High pumping speeds for shorter cycle times.
  • Energy-efficient operation with lower running costs.
  • Applications: semiconductor manufacturing, material research, and heat treatment.

Industrial pumps

Our industrial vacuum pumps, such as the GXS and Atex series, are designed for heavy-duty use in industries such as chemicals, petrochemicals, and energy.

Key Features:

  • Capacities ranging from 160 to over 40,000 m³/hour with roots blowers.
  • ATEX certification for safe operation in explosive environments.
  • Applications: distillation, gas recovery, and filtration.

Cryopumps

Cryopumps provide outstanding performance in ultra-high vacuum applications and are commonly used in research institutions and high-tech production processes.

Key Features:

  • Rapid regeneration with Fast Regen™ technology.
  • Ideal for semiconductors, optical systems, and space research.
  • Advanced software for easy operation and monitoring.

Diaphragm pumps

Diaphragm pumps are ideal for chemically sensitive applications. They are compact, robust, and resistant to chemicals.

Key Features:

  • Suitable for filtration, distillation, and central vacuum applications.
  • Can handle small amounts of liquid without damage.
  • Capacity up to 10 m³/hour and a final vacuum of approximately 1 mbar.

Scroll pumps

The nXDS and XDS series scroll pumps are quiet, maintenance-friendly, and reliable. They are widely used in research, analytical instrumentation, and semiconductor production.

Key Features:

  • Chemically resistant and oil-free.
  • Suitable for laboratories and as backing pumps for turbo pumps.
  • Low maintenance costs and high reliability.

Turbo pumps

Turbo pumps offer high flow rates and efficiency, making them ideal for cryogenic applications and analytical instrumentation.

Key Features:

  • Magnetically levitated for minimal vibration and maintenance-free operation.
  • Capacity from 300 to 4500 l/sec.
  • Versatile applications in scientific research and high-tech production.

UHV pumps

Ultra-high vacuum pumps (also known as UHV pumps) are essential for applications where extreme purity and low vacuum are required. These pumps, including titanium sublimation and ion getter pumps, deliver uncompromising performance.

Key Features:

  • Compatible with digital controllers.
  • Suitable for nuclear fusion research, material science, and other UHV applications.

RV and EM pumps

RV and EM pumps are known for their robustness and versatility. They are frequently used in laboratories and industrial environments.

Key Features:

  • High pumping speeds from 3-12 m³/hour.
  • Superior vapor handling capabilities.
  • Quiet and reliable, even under demanding conditions.

Expertise and customization

Acclon Technologies offers customized solutions that fully meet your needs. Our experts support you with advice, installation, and selecting the right vacuum pump. For more information or to schedule a consultation, please contact us via our website. Our team is ready to assist you.