Semiconductor pumps

iXM series

The iXM low energy series dry pumps can deliver genuine process improvements with increased uptime, reduced environmental impact, and cost advantages.

The energy-efficient mechanism can reduce input power by up to 60%. This reduces environmental impact and lowers costs.

The iXM series provides maximum reliability and extended pump life. The compact and lightweight design, combined with exceptionally low noise and vibration levels, ensures versatility in applications. The iXM series is available with XCEDE technology for enhanced corrosion resistance.

  • Reliable

  • Cost reduction

  • Energy saving

iXM series
iXM series
iXM series
iXM series

Product variaties

iXM200

Product description

Semiconductor

iXM600

Product description

Semiconductor

iXM1200

Product description

Semiconductor

iXM1800

Product description

Semiconductor

iXM200

Product description

Semiconductor

Ultimate vacuum

1.5x10-3mbar

Capacity

200 m3/hour

Application

Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN

iXM600

Product description

Semiconductor

Ultimate vacuum

7.5x10-3mbar

Capacity

600 m3/hour

Application

Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN

iXM1200

Product description

Semiconductor

Ultimate vacuum

3.7x10-3mbar

Capacity

1200 m3/hour

Application

Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN

iXM1800

Product description

Semiconductor

Ultimate vacuum

3.7x10-3mbar

Capacity

1800 m3/hour

Application

Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN

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