- Accessories
Accessories
- Vacuum oil
Vacuum oil
- Ultragrade Performance Vacuum Oil
- Spares
- Instrumentation
Instrumentation
- AIM200 series
- APG200 series
- Barocel series
- WRG200 series
- Gloveboxes
Gloveboxes
- Vigor gloveboxes
Vigor gloveboxes
- Cleanroom gloveboxes
- Standard gloveboxes
- Pumps
Pumps
- Diffusion pumps
Diffusion pumps
- Diffstak series
- nHT series
- Semiconductor pumps
Semiconductor pumps
- iXH series
- iXL series
- iXM series
- Multiroots vacuum pumps
Multiroots vacuum pumps
- nXR series
- Industrial pumps
Industrial pumps
- Atex series
- Dry pumps
- GXS series
- Industrial series
- UHV pumps
UHV pumps
- Digital controller
- HyTan
- IGP
- NEG
- TSP
- Cryo pumps
Cryo pumps
- Compressors
- Cryotorr
- OnBoard
- Water pumps
- Diaphragm pumps
Diaphragm pumps
- Atex series
- D-lab series
- LVS series
- MPC series
- RV vacuum pumps
RV vacuum pumps
- RV series
- EM Vacuum pumps
EM Vacuum pumps
- E2M series
- nXDS scroll pumps
nXDS scroll pumps
- nXDS series
- XDS series
- Turbomolecular pump
Turbomolecular pump
- nEXT series
- STPiS series
- STPiX series
- Maintenance
- Documentation
Semiconductor pumps
iXM series
The iXM low energy series dry pumps can deliver genuine process improvements with increased uptime, reduced environmental impact, and cost advantages.
The energy-efficient mechanism can reduce input power by up to 60%. This reduces environmental impact and lowers costs.
The iXM series provides maximum reliability and extended pump life. The compact and lightweight design, combined with exceptionally low noise and vibration levels, ensures versatility in applications. The iXM series is available with XCEDE technology for enhanced corrosion resistance.
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Reliable
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Cost reduction
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Energy saving




Product variaties
iXM200
Product description
Semiconductor
iXM600
Product description
Semiconductor
iXM1200
Product description
Semiconductor
iXM1800
Product description
Semiconductor
iXM200
Product description
Semiconductor
Ultimate vacuum
1.5x10-3mbar
Capacity
200 m3/hour
Application
Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN
iXM600
Product description
Semiconductor
Ultimate vacuum
7.5x10-3mbar
Capacity
600 m3/hour
Application
Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN
iXM1200
Product description
Semiconductor
Ultimate vacuum
3.7x10-3mbar
Capacity
1200 m3/hour
Application
Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN
iXM1800
Product description
Semiconductor
Ultimate vacuum
3.7x10-3mbar
Capacity
1800 m3/hour
Application
Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN