Semiconductor pumps

iXL series

The iXL series is a range of compact dry pumps with low energy consumption for lighter applications such as PVD and metrology.

The pumps in the iXL series are among the smallest and quietest pumps available for lighter applications. They offer fast chamber evacuation with exceptionally low energy consumption.

The ‘Green Mode’ reduces utility usage during idle periods, lowering costs and helping to improve your environmental performance.

  • Reliable

  • Cost reduction

  • Energy saving

iXL series
iXL series
iXL series

Product variaties

iXL120

Product description

Semiconductor

iXL600

Product description

Semiconductor

iXL1000

Product description

Semiconductor

iXL120

Product description

Semiconductor

Ultimate vacuum

1.5x10-3mbar

Capacity

120 m3/hour

Application

Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN

iXL600

Product description

Semiconductor

Ultimate vacuum

7.5x10-3mbar

Capacity

600 m3/hour

Application

Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN

iXL1000

Product description

Semiconductor

Ultimate vacuum

3.7x10-3mbar

Capacity

1000 m3/uur

Application

Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN

Stay up to date with our

monthly newsletter