- Accessories
Accessories
- Vacuum oil
Vacuum oil
- Ultragrade Performance Vacuum Oil
- Spares
- Instrumentation
Instrumentation
- AIM200 series
- APG200 series
- Barocel series
- WRG200 series
- Gloveboxes
Gloveboxes
- Vigor gloveboxes
Vigor gloveboxes
- Cleanroom gloveboxes
- Standard gloveboxes
- Pumps
Pumps
- Diffusion pumps
Diffusion pumps
- Diffstak series
- nHT series
- Semiconductor pumps
Semiconductor pumps
- iXH series
- iXL series
- iXM series
- Multiroots vacuum pumps
Multiroots vacuum pumps
- nXR series
- Industrial pumps
Industrial pumps
- Atex series
- Dry pumps
- GXS series
- Industrial series
- UHV pumps
UHV pumps
- Digital controller
- HyTan
- IGP
- NEG
- TSP
- Cryo pumps
Cryo pumps
- Compressors
- Cryotorr
- OnBoard
- Water pumps
- Diaphragm pumps
Diaphragm pumps
- Atex series
- D-lab series
- LVS series
- MPC series
- RV vacuum pumps
RV vacuum pumps
- RV series
- EM Vacuum pumps
EM Vacuum pumps
- E2M series
- nXDS scroll pumps
nXDS scroll pumps
- nXDS series
- XDS series
- Turbomolecular pump
Turbomolecular pump
- nEXT series
- STPiS series
- STPiX series
- Maintenance
- Documentation
Semiconductor pumps
iXL series
The iXL series is a range of compact dry pumps with low energy consumption for lighter applications such as PVD and metrology.
The pumps in the iXL series are among the smallest and quietest pumps available for lighter applications. They offer fast chamber evacuation with exceptionally low energy consumption.
The ‘Green Mode’ reduces utility usage during idle periods, lowering costs and helping to improve your environmental performance.
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Reliable
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Cost reduction
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Energy saving
Product variaties
iXL120
Product description
Semiconductor
iXL600
Product description
Semiconductor
iXL1000
Product description
Semiconductor
iXL120
Product description
Semiconductor
Ultimate vacuum
1.5x10-3mbar
Capacity
120 m3/hour
Application
Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN
iXL600
Product description
Semiconductor
Ultimate vacuum
7.5x10-3mbar
Capacity
600 m3/hour
Application
Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN
iXL1000
Product description
Semiconductor
Ultimate vacuum
3.7x10-3mbar
Capacity
1000 m3/uur
Application
Semicon, high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN