- Accessories
Accessories
- Vacuum oil
Vacuum oil
- Ultragrade Performance Vacuum Oil
- Spares
- Instrumentation
Instrumentation
- AIM200 series
- APG200 series
- Barocel series
- WRG200 series
- Gloveboxes
Gloveboxes
- Vigor gloveboxes
Vigor gloveboxes
- Cleanroom gloveboxes
- Standard gloveboxes
- Pumps
Pumps
- Diffusion pumps
Diffusion pumps
- Diffstak series
- nHT series
- Semiconductor pumps
Semiconductor pumps
- iXH series
- iXL series
- iXM series
- Multiroots vacuum pumps
Multiroots vacuum pumps
- nXR series
- Industrial pumps
Industrial pumps
- Atex series
- Dry pumps
- GXS series
- Industrial series
- UHV pumps
UHV pumps
- Digital controller
- HyTan
- IGP
- NEG
- TSP
- Cryo pumps
Cryo pumps
- Compressors
- Cryotorr
- OnBoard
- Water pumps
- Diaphragm pumps
Diaphragm pumps
- Atex series
- D-lab series
- LVS series
- MPC series
- RV vacuum pumps
RV vacuum pumps
- RV series
- EM Vacuum pumps
EM Vacuum pumps
- E2M series
- nXDS scroll pumps
nXDS scroll pumps
- nXDS series
- XDS series
- Turbomolecular pump
Turbomolecular pump
- nEXT series
- STPiS series
- STPiX series
- Maintenance
- Documentation
More information about
Cryo pumps
Edwards’ CTI-Cryogenics technology leads the way in cryogenic high-vacuum technology. Whether it’s individual cryopumps used in various high-tech applications or advanced cryopump systems contributing to the production of semiconductors, flat panels, and optical equipment.
The Fast Regen™ feature ensures that cryopumps last longer between regenerations. With our cryopump network capability, they can regenerate simultaneously, speeding up the regeneration time of the entire system. These pumps also have built-in electronics to enhance performance, provide diagnostic data, and offer communication capabilities. The advanced software and user-friendly graphical interface significantly improve performance and operation.
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Fast Regen™
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More than 1,000 satisfied customers served
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Over 25 years of in-house experience

Compressors
Designed for optimal performance with On-Board Cryopumps, On-Board Waterpumps, and Cryotorr Cryopumps, these compressors support all pumps up to 12 inches in size.
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Cryotorr
Cryotorr cryopumps are characterized by low operational costs and quick, easy maintenance.
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OnBoard
The On-Board Cryopumps, with integrated controls and additional peripheral equipment, ensure unparalleled uptime and consistent performance.
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Water pumps
Edwards CTI-Cryogenics On-Board Waterpumps verhogen de pompsnelheid voor waterdamp aanzienlijk.
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