More information about

Cryo pumps

Edwards’ CTI-Cryogenics technology leads the way in cryogenic high-vacuum technology. Whether it’s individual cryopumps used in various high-tech applications or advanced cryopump systems contributing to the production of semiconductors, flat panels, and optical equipment.

The Fast Regen™ feature ensures that cryopumps last longer between regenerations. With our cryopump network capability, they can regenerate simultaneously, speeding up the regeneration time of the entire system. These pumps also have built-in electronics to enhance performance, provide diagnostic data, and offer communication capabilities. The advanced software and user-friendly graphical interface significantly improve performance and operation.

  • Fast Regen™

  • More than 1,000 satisfied customers served

  • Over 25 years of in-house experience

Cryopompen compressors

Compressors

Designed for optimal performance with On-Board Cryopumps, On-Board Waterpumps, and Cryotorr Cryopumps, these compressors support all pumps up to 12 inches in size.

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Cryopompen

Cryotorr

Cryotorr cryopumps are characterized by low operational costs and quick, easy maintenance.

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Onboard cryopompen

OnBoard

The On-Board Cryopumps, with integrated controls and additional peripheral equipment, ensure unparalleled uptime and consistent performance.

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Waterpomp cryopompen

Waterpumps

Edwards CTI-Cryogenics On-Board Waterpumps significantly increase the pumping speed for water vapor.

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