- Accessories
Accessories
- Vacuum Oil
Vacuum Oil
- Ultragrade Performance Vacuum Oil
- Spares
- Instrumentation
Instrumentation
- AIM200 series
- APG200 series
- Barocel series
- WRG200 series
- Gloveboxes
Gloveboxes
- Vigor gloveboxes
Vigor gloveboxes
- Cleanroom gloveboxes
- Standard gloveboxes
- Pumps
Pumps
- Diffusion pumps
Diffusion pumps
- Diffstak series
- nHT series
- Semiconductor pumps
Semiconductor pumps
- iXH series
- iXL series
- iXM series
- Multiroots vacuum pumps
Multiroots vacuum pumps
- nXR series
- Industrial pumps
Industrial pumps
- Atex series
- Dry pumps
- GXS series
- Industrial series
- UHV pumps
UHV pumps
- Digital controller
- HyTan
- IGP
- NEG
- TSP
- Cryo pumps
Cryo pumps
- Compressors
- Cryotorr
- OnBoard
- Waterpumps
- Diaphragm pumps
Diaphragm pumps
- Atex series
- D-lab series
- LVS series
- MPC series
- RV vacuum pumps
RV vacuum pumps
- RV series
- EM Vacuum pumps
EM Vacuum pumps
- E2M series
- nXDS scroll pumps
nXDS scroll pumps
- nXDS series
- XDS series
- Turbopumps
Turbopumps
- nEXT series
- STPiS series
- STPiX series
- Maintenance
- Documentation
Cryo pumps
Compressors
Designed for optimal performance with On-Board Cryopumps, On-Board Waterpumps, and Cryotorr Cryopumps, these compressors support all pumps up to 12 inches in size. Since the compressors are designed for flexibility, you can position them wherever it is most convenient for your system’s operation.
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Available with capacities of 8200, 9600, and 9700A
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Flexible
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For Semicon, Coating, R&D
Product variaties
Compressor 8200
Product description
Cryopumps
Compressor 9600
Product description
Cryopumps
Compressor 9700A
Product description
Cryopumps
Compressor 8200
Product description
Cryopumps
Capacity
8200
Application area
Semicon, Coating, R&D
Compressor 9600
Product description
Cryopumps
Capacity
9600
Application area
Semicon, Coating, R&D
Compressor 9700A
Product description
Cryopumps
Capacity
9700A
Application area
Semicon, Coating, R&D