Cryo pumps

Compressors

Designed for optimal performance with On-Board Cryopumps, On-Board Waterpumps, and Cryotorr Cryopumps, these compressors support all pumps up to 12 inches in size. Since the compressors are designed for flexibility, you can position them wherever it is most convenient for your system’s operation.

  • Available with capacities of 8200, 9600, and 9700A

  • Flexible

  • For Semicon, Coating, R&D

Compressors
Compressors
Compressors

Product variaties

Compressor 8200

Product description

Cryopumps

Compressor 9600

Product description

Cryopumps

Compressor 9700A

Product description

Cryopumps

Compressor 8200

Product description

Cryopumps

Capacity

8200

Application area

Semicon, Coating, R&D

Compressor 9600

Product description

Cryopumps

Capacity

9600

Application area

Semicon, Coating, R&D

Compressor 9700A

Product description

Cryopumps

Capacity

9700A

Application area

Semicon, Coating, R&D

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