We serve the market

Semiconductor

An environment for innovation

The challenges of performance, safety, and environmental compliance can be daunting. Our global leadership in vacuum and gas processing for semiconductor manufacturing is built on a wealth of knowledge gained through decades of experience, information, and data collection.

This allows us to provide our customers with cost-effective solutions that enhance efficiency, meet environmental goals, and reduce the total cost of ownership, all driven by a culture of continuous innovation.

We constantly strive to understand our customers’ challenges regarding vacuum and environmental requirements. We take pride in our recognized global position as a leading provider of environmental and vacuum solutions that support our customers’ productivity goals.

Lower operating costs and more uptime

Our products are designed to help you achieve long-term process savings and develop sustainable business practices. The innovative technologies we have developed have advanced the use of vacuum in industrial applications, lowered capital costs, improved operational efficiency, and reduced environmental impact.

Pump systems can be fully integrated with exhaust gas management for turnkey delivery and machine integration.

Examples of semiconductor applications

Our pumps are widely used in semiconductor manufacturing processes such as:

  • CVD, ALD, PECVD, and other deposition processes
  • Ion etching
  • Implantation processes
  • Epitaxy processes
  • Annealing
  • MBE processes