- Accessories
Accessories
- Vacuum Oil
Vacuum Oil
- Ultragrade Performance Vacuum Oil
- Spares
- Instrumentation
Instrumentation
- AIM200 series
- APG200 series
- Barocel series
- WRG200 series
- Gloveboxes
Gloveboxes
- Vigor gloveboxes
Vigor gloveboxes
- Cleanroom gloveboxes
- Standard gloveboxes
- Pumps
Pumps
- Diffusion pumps
Diffusion pumps
- Diffstak series
- nHT series
- Semiconductor pumps
Semiconductor pumps
- iXH series
- iXL series
- iXM series
- Multiroots vacuum pumps
Multiroots vacuum pumps
- nXR series
- Industrial pumps
Industrial pumps
- Atex series
- Dry pumps
- GXS series
- Industrial series
- UHV pumps
UHV pumps
- Digital controller
- HyTan
- IGP
- NEG
- TSP
- Cryo pumps
Cryo pumps
- Compressors
- Cryotorr
- OnBoard
- Waterpumps
- Diaphragm pumps
Diaphragm pumps
- Atex series
- D-lab series
- LVS series
- MPC series
- RV vacuum pumps
RV vacuum pumps
- RV series
- EM Vacuum pumps
EM Vacuum pumps
- E2M series
- nXDS scroll pumps
nXDS scroll pumps
- nXDS series
- XDS series
- Turbopumps
Turbopumps
- nEXT series
- STPiS series
- STPiX series
- Maintenance
- Documentation
We serve the market
Semiconductor
An environment for innovation
The challenges of performance, safety, and environmental compliance can be daunting. Our global leadership in vacuum and gas processing for semiconductor manufacturing is built on a wealth of knowledge gained through decades of experience, information, and data collection.
This allows us to provide our customers with cost-effective solutions that enhance efficiency, meet environmental goals, and reduce the total cost of ownership, all driven by a culture of continuous innovation.
We constantly strive to understand our customers’ challenges regarding vacuum and environmental requirements. We take pride in our recognized global position as a leading provider of environmental and vacuum solutions that support our customers’ productivity goals.
Lower operating costs and more uptime
Our products are designed to help you achieve long-term process savings and develop sustainable business practices. The innovative technologies we have developed have advanced the use of vacuum in industrial applications, lowered capital costs, improved operational efficiency, and reduced environmental impact.
Pump systems can be fully integrated with exhaust gas management for turnkey delivery and machine integration.
Examples of semiconductor applications
Our pumps are widely used in semiconductor manufacturing processes such as:
- CVD, ALD, PECVD, and other deposition processes
- Ion etching
- Implantation processes
- Epitaxy processes
- Annealing
- MBE processes