Cryo pumps

OnBoard

Edwards CTI-Cryogenics On-Board vacuum pumps offer accelerated system integration and optimized system operation. They are globally renowned for their reliability and efficiency. The On-Board Cryopumps, with integrated controls and additional peripheral equipment, ensure unparalleled uptime and consistent performance, resulting in increased productivity and operational uptime.

  • Reliable

  • Efficient

  • Increased productivity

OnBoard

Product variaties

OnBoard

Product description

Cryopumps

OnBoard

Product description

Cryopumps

Capacity

max 30.000 l/sec

Application area

Semicon, Coating, R&D

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