NEG pumps offer high pumping speeds for H2, as well as for chemically active gases like N2, O2, and CO, while ion pumps efficiently evacuate all types of gases, including noble gases and methane. HyTan NEG-Ion pumps combine both technologies in a single compact UHV pump.
Thanks to the combination of the interchangeable modules of the NEG pumps, which offer hydrogen pumping speeds ranging from 100 to 500 l/s, and the noble and conventional diode elements of the ion pump module, this innovative technology is suitable for a wide range of applications.
With its compact size and the ability to mount the pump inside a chamber, the HyTan NEG-Ion pump is ideal for UHV environments where space is limited.
