- Accessories
Accessories
- Vacuum Oil
Vacuum Oil
- Ultragrade Performance Vacuum Oil
- Spares
- Instrumentation
Instrumentation
- AIM200 series
- APG200 series
- Barocel series
- WRG200 series
- Gloveboxes
Gloveboxes
- Vigor gloveboxes
Vigor gloveboxes
- Cleanroom gloveboxes
- Standard gloveboxes
- Pumps
Pumps
- Diffusion pumps
Diffusion pumps
- Diffstak series
- nHT series
- Semiconductor pumps
Semiconductor pumps
- iXH series
- iXL series
- iXM series
- Multiroots vacuum pumps
Multiroots vacuum pumps
- nXR series
- Industrial pumps
Industrial pumps
- Atex series
- Dry pumps
- GXS series
- Industrial series
- UHV pumps
UHV pumps
- Digital controller
- HyTan
- IGP
- NEG
- TSP
- Cryo pumps
Cryo pumps
- Compressors
- Cryotorr
- OnBoard
- Waterpumps
- Diaphragm pumps
Diaphragm pumps
- Atex series
- D-lab series
- LVS series
- MPC series
- RV vacuum pumps
RV vacuum pumps
- RV series
- EM Vacuum pumps
EM Vacuum pumps
- E2M series
- nXDS scroll pumps
nXDS scroll pumps
- nXDS series
- XDS series
- Turbopumps
Turbopumps
- nEXT series
- STPiS series
- STPiX series
- Maintenance
- Documentation
More information about
Semiconductor pumps
Our advanced range of dry semiconductor pumps is designed to offer the latest technologies to enhance your production environment.
Each product in our range is specifically engineered to provide benefits in environmental friendliness, reliability under challenging conditions, and flexibility for lighter applications.
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Environmentally friendly
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Reliable
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Cost-efficient
iXH series
The iXH series sets new standards in terms of powerful process capability, reliability, and cost reduction.
View product variationsiXL series
The iXL series is a range of compact dry pumps with low energy consumption for lighter applications such as PVD and metrology.
View product variationsiXM series
The iXM series offers real process improvements with increased uptime, reduced environmental impact, and cost benefits for the most critical applications.
View product variations