iXH series

The iXH series sets new standards in terms of powerful process capability, reliability, and cost reduction. The extensive temperature range allows for precise tuning of the pump to minimize the buildup of byproducts through condensation and deposition.

Our enhanced semiconductor pumps extend lifespan even under the most challenging conditions and deliver significant benefits in energy efficiency.

By utilizing our innovative pump sealing technology, you can extend the lifespan of your processes and reduce the risk of leakage.
Additionally, they are equipped with XCEDE technology for superior corrosion resistance.